EG-DL Series XYZ Three-Axis Linear motor Stage

Product Overview

This series is a vertical motion platform with nanometer-level positioning accuracy for Z-axis mounting. It employs advanced linear motor drive technology and cylinder counterweights, combined with a high-precision crossed roller guide design, providing users with superior nanometer-level positioning accuracy and stability. The DL130ZL series has a maximum vertical load of 10kg, a maximum speed of 200mm/s, and a maximum no-load acceleration of 1g. Flexible customization options are available to suit various customer applications.

Performance Characteristics

⚫ Z-axis mounting linear nanopositioning platform

⚫ Driven by a linear motor, with cylinder counterweight, and equipped with high-precision crossed roller guides

⚫ Flatness and straightness throughout the entire stroke less than ±2μm

⚫ Resolution 1nm, repeatability ±100nm, positioning accuracy ±300nm

⚫ Cutoff frequency greater than 100Hz, excellent dynamic performance

⚫ Strong load-bearing capacity, maximum vertical load 10kg
Application Scenarios
The DL130ZL series platform is a comprehensive Z-axis mounting nanopositioning platform that balances motion accuracy, high dynamic performance, and strong load-bearing capacity. It can be applied to the following scenarios:

Gene sequencing in the biomedical field

Fiber optic microsystem fabrication

Measurement and inspection, surface contour detection

Fiber optic alignment, optical manufacturing and inspection

Sensor testing and scanning processes